Enhanced sensitivity and depth resolution of oxygen detection combining resonance scattering and tilted target methods

Using glancing incidence (a target tilt between 80-830), the depth resolution of the 16O(α,α)16O resonance for oxygen detection has been improved by a factor of 5-7 depending on the depth. The more buried the oxide, the more straggling contribution is observed. Besides, at present scattering geometry an additionally 3.5 times better detection limit is achieved. (orig.)