Published June 12, 2006
| Version v1
Journal article
Structural analysis of cubic boron nitride films by ultraviolet Raman spectroscopy
Creators
- 1. Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Kowloon Tong, Hong Kong (China) and Surface Science Western, University of Western Ontario, London, N6A 5B7, Ontario Canada
- 2. Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Kowloon Tong, Hong Kong (China)
Description
Cubic boron nitride (BN) films with improved crystallinity are deposited by physical vapor deposition at an extremely low substrate bias (-35 V). The films are characterized by UV Raman in association with Fourier transformed infrared (FTIR) spectroscopy. The influences of bias voltage and film thickness on the characterizations are investigated. UV Raman, in contrast to FTIR, is demonstrated to be a more powerful tool with high sensitivity for quantitative and/or qualitative evaluation of the phase purity and crystallinity, especially as the film thickness increases. Hexagonal BN inclusions (less than 1%), not evident in FTIR, are clearly revealed by UV Raman analysis
Additional details
Identifiers
- DOI
- 10.1063/1.2207994;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 88
- Journal Issue
- 24
- Journal Page Range
- p. 241922-241922.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37083696
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BORON NITRIDES; CRYSTAL GROWTH; CUBIC LATTICES; ELECTRIC POTENTIAL; FOURIER TRANSFORM SPECTROMETERS; IMPURITIES; INCLUSIONS; INFRARED SPECTRA; INFRARED SPECTROMETERS; PHYSICAL VAPOR DEPOSITION; RAMAN SPECTRA; RAMAN SPECTROSCOPY; SEMICONDUCTOR MATERIALS; SUBSTRATES; THICKNESS; THIN FILMS; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTRA
- Descriptors DEC
- BORON COMPOUNDS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; DEPOSITION; DIMENSIONS; ELECTROMAGNETIC RADIATION; FILMS; LASER SPECTROSCOPY; MATERIALS; MEASURING INSTRUMENTS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATIONS; SPECTRA; SPECTROMETERS; SPECTROSCOPY; SURFACE COATING
Optional Information
- Notes
- (c) 2006 American Institute of Physics