Published April 1, 2006
| Version v1
Journal article
Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (0 0 1) at the sub-100 nm scale
- 1. Department of Applied Physics and Physico-Informatics, Keio University, 3-14-1, Hiyoshi, Kohoko-ku, Yokohama, 223-8522 (Japan)
- 2. INRS-EMT, Universite du Quebec, Varennes (Quebec) (Canada)
- 3. Department de Physique, Universite de Montreal, Montreal (Quebec) (Canada)
- 4. Department of Physics and Astronomy, University of Western Ontario, London (Canada)
- 5. Institut fuer Festkoerperelektronik, Technische Universitaet Vienna (Austria)
- 6. Institut fuer Festkoerperelektronik, Technische Universitaet Wien (Austria)
Description
We studied the thermal evolution of H/D-stabilized defects aiming at understanding the microscopic mechanisms leading to crystalline silicon surface blistering and exfoliation. The critical hydrogen-defect complexes involved in this phenomenon have been identified by Raman spectroscopy analysis. A plausible mechanism for the ion-cut process emerging from our analyses is proposed. Surprising but instructive effects observed under isotope substitution are also discussed
Additional details
Identifiers
- DOI
- 10.1016/j.physb.2005.12.011;
- PII
- S0921-4526(05)01400-6;
Publishing Information
- Journal Title
- Physica. B, Condensed Matter
- Journal Volume
- 376-377
- Journal Page Range
- p. 36-40
- ISSN
- 0921-4526
- CODEN
- PHYBE3
Conference
- Title
- 23. international conference on defects in semiconductors
- Dates
- 24-29 Jul 2005
- Place
- Awaji Island (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37073060
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMPLEXES; DEUTERIUM; HYDROGEN; ISOTOPE EFFECTS; POINT DEFECTS; RAMAN SPECTROSCOPY; SILICON; SILICON IONS; SURFACES
- Descriptors DEC
- CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELEMENTS; HYDROGEN ISOTOPES; IONS; ISOTOPES; LASER SPECTROSCOPY; LIGHT NUCLEI; NONMETALS; NUCLEI; ODD-ODD NUCLEI; SEMIMETALS; SPECTROSCOPY; STABLE ISOTOPES
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.