Published 2007
| Version v1
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RBS diagnostics of nanodimensional film Ti-B-C structures
- 1. Inst. Problem Tekhnologii Mikroehlektroniki i Osobochistykh Materialov RAN, Chernogolovka (Russian Federation)
- 2. Inst. Problem Khimicheskoj Fiziki RAN, Chernogolovka (Russian Federation)
Description
no abstract available
Files
39043431.pdf
Files
(37.6 kB)
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Additional details
Additional titles
- Original title (Russian)
- ROR-диагностика наноразмерных пленочных структур системы Ти-Б-C
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 178 p.
- Journal Page Range
- p. 129
- Report number
- INIS-RU--505
Conference
- Title
- 37. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXVII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2007
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39043431
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- EXPERIMENTAL DATA; MAGNETRONS; NANOSTRUCTURES; QUANTITATIVE CHEMICAL ANALYSIS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPRAYED COATINGS; SPUTTERING; TERNARY ALLOY SYSTEMS; THIN FILMS; TITANIUM BORIDES; TITANIUM CARBIDES; X-RAY FLUORESCENCE ANALYSIS
- Descriptors DEC
- ALLOY SYSTEMS; BORIDES; BORON COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CHEMICAL ANALYSIS; COATINGS; DATA; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; INFORMATION; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONDESTRUCTIVE ANALYSIS; NUMERICAL DATA; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; X-RAY EMISSION ANALYSIS
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov XXXVII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami