Published March 1, 2007 | Version v1
Journal article Metadata-only

A method for computing ion energy distributions for multifrequency capacitive discharges

Creators

  • 1. Department of Nuclear Engineering, University of California, Berkeley, California 94720 (United States)
  • 2. Department of Electrical Engineering, University of California, Berkeley, California 94720 (United States)
  • 3. Department of Nuclear Engineering and Department of Electrical Engineering, University of California, Berkeley, California 94720 (United States)

Description

The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations

Additional details

Identifiers

DOI
10.1063/1.2435975;

Publishing Information

Journal Title
Journal of Applied Physics
Journal Volume
101
Journal Issue
5
Journal Page Range
p. 056105-056105.3
ISSN
0021-8979
CODEN
JAPIAU

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39011493
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ELECTRIC POTENTIAL; ENERGY SPECTRA; EXCITATION; HIGH-FREQUENCY DISCHARGES; IONS; PLASMA SHEATH; PLASMA SIMULATION; RADIOWAVE RADIATION; TRANSFER FUNCTIONS; WALL EFFECTS
Descriptors DEC
CHARGED PARTICLES; ELECTRIC DISCHARGES; ELECTROMAGNETIC RADIATION; ENERGY-LEVEL TRANSITIONS; FUNCTIONS; RADIATIONS; SIMULATION; SPECTRA

Optional Information

Notes
(c) 2007 American Institute of Physics