Published July 2007 | Version v1
Journal article Metadata-only

Thin film shape memory alloys for optical sensing applications

Creators

  • 1. Department of Engineering, Cambridge University, 9 JJ Thomson Ave, Cambridge, CB3, 0FA (United Kingdom)
  • 2. School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798 (Singapore)

Description

Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si3N4microcantilever mirror structures were fabricated

Additional details

Identifiers

DOI
10.1088/1742-6596/76/1/012032;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
76
Journal Issue
1
Journal Page Range
p. 012032
ISSN
1742-6596

Conference

Title
Sensors and their applications
Dates
11-13 Sep 2007
Place
Liverpool (United Kingdom)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39029332
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
INTERMETALLIC COMPOUNDS; MACHINING; MEMBRANES; MIRRORS; NICKEL; SHAPE MEMORY EFFECT; SURFACES; THIN FILMS; TITANIUM
Descriptors DEC
ALLOYS; ELEMENTS; FILMS; METALS; TRANSITION ELEMENTS