Published March 1980
| Version v1
Report
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Development of a piezo-electric gas valve with high mass-flow-rate
Description
A pulsed-gas valve with features of (i) high-repetition rate, (ii) high-mass-flow rate, (iii) fast response, (iv) quasi-steadiness, and (v) good reproducibility has been developed by using a bimorph piezo-electric crystal. Characteristics of the valve is investigated with a fast-ionization gauge. The newly-developed valve is suitable for pulsed-gas injection with much higher (one order of magnitude) mass-flow-rate, faster response, better reproducibility than those obtained by a commercial piezo-electric valve (VEECO Ltd. Model PV-10). (author)
Availability note (English)
MF available from INIS under the Report Number.Files
12628356.pdf
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Additional details
Publishing Information
- Imprint Pagination
- 8 p.
- Report number
- IPPJ-DT--77
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 12628356
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- FLOW RATE; GASES; HYSTERESIS; JETS; ORIFICES; PERFORMANCE; PIEZOELECTRICITY; PLASMA; VALVES
- Descriptors DEC
- CONTROL EQUIPMENT; ELECTRICITY; FLOW REGULATORS; FLUIDS; OPENINGS