Published 1975
| Version v1
Report
Restricted
Use of radioactive tracers in the semiconductor industry
Creators
- 1. Isotopen Technik Dr. Sauerwein G.m.b.H., Duesseldorf (F.R. Germany)
Description
Manufacture of the semiconductor materials comprises production and purification of the raw materials (GeC14 or SiHC13), purification of the elemental semiconductors by metallurgical methods (including zone melting), production and doping of single crystals, dividing the crystals into slices of suitable size, formation of p-n junctions and fabrication of the finished semiconductor devices. In the sequence of operations, the behavior of very small quantities of an element must be monitored, and radioactive tracers are often used to solve these problems. Examples are given of the use of radioactive tracers in the semiconductor industry
Availability note (English)
MF available from INIS under the Report Number.
Files
Restricted
The record is publicly accessible, but files are restricted to users with access.
Additional details
Publishing Information
- Imprint Pagination
- 100 p.
- Report number
- EURISOTOP--96
INIS
- Country of Publication
- European Commission (EC), Brussels (Belgium)
- Country of Input or Organization
- European Commission (EC), Brussels (Belgium)
- INIS RN
- 7246120
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Descriptors DEI
- FABRICATION; INDUSTRY; SEMICONDUCTOR DEVICES; SEMICONDUCTOR JUNCTIONS; SEMICONDUCTOR MATERIALS; TRACER TECHNIQUES
- Descriptors DEC
- ISOTOPE APPLICATIONS