Published 1999
| Version v1
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Vacuum equipment of cluster type for thin film deposition
Creators
- 1. AOOT 'Nauchno-issledovatel'skij institut tochnogo mashinostroeniya', Zelenograd (Russian Federation)
Description
Parameters of multi-camera vacuum installations of 'cluster' type for multi lager and multicomponent film deposition by magnetron sputtering are given. Technological process of four-layer Ti-TiN-Al-TiN film deposition in a single vacuum cycle
Files
32051649.pdf
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Additional details
Additional titles
- Original title (Russian)
- Вакуумное оборудование кластерного типа для нанесения тонких пленок
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 173 p.
- Journal Page Range
- p. 22-24
- Report number
- INIS-UA--071(V.1)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 1.
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 1
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051649
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM; CATHODE SPUTTERING; FABRICATION; LAYERS; NITROGEN; SURFACE CLEANING; SURFACE COATING; THIN FILMS; TITANIUM; TITANIUM NITRIDES; VACUUM COATING; VACUUM SYSTEMS
- Descriptors DEC
- CLEANING; DEPOSITION; ELEMENTS; FILMS; METALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; SPUTTERING; SURFACE COATING; SURFACE FINISHING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3