Published 1989
| Version v1
Book
IR laser absorption studies of radical concentrations in CF4 RF plasmas
Creators
- 1. Aerodyne Research, Inc., Billerica, MA (USA). Center for Chemical and Environmental Physics
Description
Infrared tunable diode laser absorption studies of process plasmas are being carried out in a laboratory reactor which allows a long absorption path. In this paper the authors report studies of CF4 radio frequency plasmas. For these studies, the reactor had an absorption path length of about 38 m. The electrodes were shielded from the plasma by a teflon liner. Results to date show a strong dependence on the properties of the reactor surfaces
Additional details
Publishing Information
- Publisher
- IEEE Service Center.
- Imprint Place
- Piscataway, NJ (USA)
- Imprint Title
- Proceedings of the 1989 IEEE international conference on plasma science (Abstracts)
- Imprint Pagination
- 180 p.
- Journal Page Range
- p. 156.
Conference
- Title
- Institute of Electrical and Electronics Engineers international conference on plasma science.
- Dates
- 22-24 May 1989.
- Place
- Buffalo, NY (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 21038183
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- ABSORPTION SPECTRA; CARBON FLUORIDES; CHEMICAL REACTION KINETICS; ELECTRODES; EXPERIMENTAL DATA; INFRARED RADIATION; LIMITERS; LINERS; MULTI-PARAMETER ANALYSIS; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; PLASMA SIMULATION; PULSED REACTORS; RF SYSTEMS; SEMICONDUCTOR LASERS; TEFLON
- Descriptors DEC
- AMPLIFIERS; CARBON COMPOUNDS; DATA; ELECTROMAGNETIC RADIATION; EQUIPMENT; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; INFORMATION; KINETICS; LASERS; NUMERICAL DATA; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; POLYETHYLENES; POLYMERS; POLYOLEFINS; RADIATIONS; REACTION KINETICS; REACTORS; SEMICONDUCTOR DEVICES; SIMULATION; SOLID STATE LASERS; SPECTRA
Optional Information
- Secondary number(s)
- CONF-8905184--.