Performance of an active electric bearing for rotary micromotors

An electric bearing used to support a micromachined rotor of variable-capacitance motors was designed and tested in order to study the characteristics of this frictionless bearing. Electrostatic suspension of a ring-shaped rotor in five degrees of freedom is required to eliminate the mechanical bearing and thus the friction and wear between the rotor and the substrate. Bulk microfabrication-based glass/silicon/glass bonding is chosen for this device, allowing the fabrication of large area sense capacitors and rotor, which make the device potentially suitable for the development of an electrostatically suspended micromachined gyroscope. The device and its basic operating principle are described, as well as the dynamics of the rotor and basic design considerations of the electric bearing system. A theoretical relationship to relate the characteristics of a classical lag–lead compensator to the stiffness properties of the electric bearing is developed to explain the experimental bearing measurements. The experimental results of closed-loop frequency response, suspension stiffness and drive voltage effects are presented and discussed for the bearing operated initially in the atmospheric environment. The performance of a tri-axial electrostatic accelerometer has also been experimentally investigated on the prototype of the electric bearing system