Synthesis of high-temperature superconducting Y-Ba-Cu-O film by ICB

This paper reports on as-grown Y-Ba-Cu-O thin films with high transition temperature synthesized by utilizing ionized cluster beam (ICB) code-position of Y, Ba and Cu in the activated oxygen atmosphere. The activated oxygen was generated by silent discharge and was ejected to the substrate. The pressure in the chamber was kept at 1.3 x 10-2 Pa, and the substrate was heated from 600 degrees C to 650 degrees C. The transition temperature to zero-resistance state (Tc, zero) of the as-grown film on the MgO(100) substrate was above the boiling point of liquid nitrogen