Published 1977 | Version v1
Journal article Metadata-only

Investigation of anodically produced oxid layers using the mass spectroscopy of sputtered neutral particles (SNMS)

Creators

  • 1. Technische Univ. Clausthal, Clausthal-Zellerfeld (Germany, F.R.). Physikalisches Inst.

Description

no abstract available

Additional details

Additional titles

Original title (German)
Untersuchung anodisch erzeugter Oxidschichten mit Hilfe der Massenspektrometrie zerstaeubter Neutralteilchen (SNMS)

Publishing Information

Journal Title
Verh. Dtsch. Phys. Ges.
Journal Issue
no. 1
Series
Verh. Dtsch. Phys. Ges.

Conference

Title
Spring meeting of the Arbeitskreis Festkoerperphysik at the Deutsche Physikalische Gesellschaft e.V. in conjunction with the Nederlandse Natuurkundige Vereninging and 2. symposium on solid state device technology.
Dates
7 - 12 Mar 1977.
Place
Muenster, Germany, F.R.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
8319604
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ARGON 40 BEAMS; ELECTRODEPOSITED COATINGS; MASS SPECTROSCOPY; NIOBIUM OXIDES; SPUTTERING; TANTALUM OXIDES
Descriptors DEC
BEAMS; CHALCOGENIDES; COATINGS; ION BEAMS; NIOBIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; SPECTROSCOPY; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
Short communication only.
Secondary number(s)
AED-Conf--77-079-263.