Vacuum arc gas/metal ion sources with a magnetic field

This types of vacuum arc ion source provides the generation of ions of various gases and metals. A specific feature of these ion sources is the use of two cold-cathode arc discharges to produce plasma for the extraction of ion beams. Metal ions are generated by means of a vacuum arc in the metal vapor produced by cathode spots. Gas ions are generated by a constricted low-pressure arc discharge. In this paper we discuss the problem as follows: the production of broad beams by extracting ions from the anode cavity in the transverse direction and the initiation of a vacuum arc cathode spot by an auxiliary discharge in a strong magnetic field. copyright 1996 American Institute of Physics