Published 1999
| Version v1
Journal article
Experimental Investigation of Pulsed Plasma Generated by a High-Current Hybrid Source
- 1. Institute for Terotechnology, Radom (Poland)
- 2. Kharkov State University, Kharkov (Ukraine)
- 3. Scientific Center of Physical Technologies, Kharkov (Ukraine)
Description
Experimental investigations of a new type of plasma source for thin films deposition from pulsed reactive plasma are presented in the paper. The source combines the process of reactive plasma generation in the cylindrical magnetron system with the process of generated plasma acceleration in the coaxial accelerator system. The aim of the research described was to examine the generation and acceleration processes of the reactive plasma in such hybrid source. (author)
Additional details
Publishing Information
- Journal Title
- Journal of Technical Physics
- Journal Volume
- 40
- Journal Issue
- 1,suppl
- Journal Page Range
- p. 477-480
- ISSN
- 0324-8313
Conference
- Title
- International Symposium PLASMA'99
- Acronym
- Research and Application of Plasmas
- Dates
- 7-9 Jul 1999
- Place
- Warsaw (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32029923
- Subject category
- S43: PARTICLE ACCELERATORS; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRIC DISCHARGES; ENERGY BEAM DEPOSITION; EQUIPMENT; ION SOURCES; MAGNETRONS; NITROGEN IONS; THIN FILMS; TITANIUM IONS
- Descriptors DEC
- CHARGED PARTICLES; DEPOSITION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; IONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; SURFACE COATING
Optional Information
- Contract/Grant/Project number
- KBN Project 7T08C05113
- Notes
- 3 refs, 4 figs
- Funding organization
- Polish State Committee for Scientific Research, Warsaw (Poland)