Thin films stoichiometry and impurity concentration analysis studied by nuclear techniques

Rutherford backscattering spectrometry with MeV helium and proton ion beams is a suitable technique for studying the stoichiometry ratios of almost all elements present on the surface of materials, with the important exception of the lighter ones. Specific nuclear reactions, using low energy deuteron beams, are used for the analysis of the most important surface contaminants such as oxygen, carbon and nitrogen. The presence of hydrogen isotopes can be studied by means of nuclear reactions and forward elastic scattering. (orig.)