Laser microfabrication technology and its application to high speed interconnect of gate arrays

A goal of the LLNL Laser Pantography (LP) program has been demonstrating processes in which a computer-steered and computer-modulated laser beam directly deposits or removes material onto or from a substrate such as a silicon wafer. Substantial advantages could accrue from a fully developed set of such processes, including: lower cost for prototyping and low volume manufacturing, faster fabrication, on-line repair, and customized computers. 7 refs., 10 figs