Published 2016 | Version v1
Journal article Metadata-only

Modeling of atomic processes and hydrodynamics of the plasma EUV sources

Creators

  • 1. National Institutes for Quantum and Radiological Science and Technology, Kansai Photon Science Institute, Kizugawa, Kyoto (Japan)

Description

The simulation model of the laser produced plasma EUV source is presented on the basis of the physics of the atomic processes of multiple charged tin ions and the hydrodynamics of the laser produced plasmas. Methods applicable to complex numerical calculations are also discussed. (author)

Additional details

Additional titles

Original title (Japanese)
プラズマEUV光源の原子過程と流体力学シミュレーションの課題

Publishing Information

Journal Title
Hoshasen Kagaku (Online)
Journal Issue
no.102
Series
雑誌名:放射線化学
Journal Page Range
p. 35-39
ISSN
2188-0115

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
49075368
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
COMPRESSIBLE FLOW; ELECTRON TEMPERATURE; EMISSION SPECTRA; EXCITED STATES; EXTREME ULTRAVIOLET RADIATION; HYDRODYNAMICS; LASER RADIATION; LASER TARGETS; LASER-PRODUCED PLASMA; LIGHT SOURCES; PLASMA SIMULATION; PUMPING; THERMAL CONDUCTION; WAVELENGTHS
Descriptors DEC
ELECTROMAGNETIC RADIATION; ENERGY LEVELS; ENERGY TRANSFER; FLUID FLOW; FLUID MECHANICS; HEAT TRANSFER; MECHANICS; PLASMA; RADIATION SOURCES; RADIATIONS; SIMULATION; SPECTRA; TARGETS; ULTRAVIOLET RADIATION

Optional Information

Notes
15 refs., 4 figs.