Published November 1988
| Version v1
Journal article
Effect of the composition of solid solutions on the conditions of coherent growth of GaxIn1-xAsyP1-y epitaxial layers
Creators
- 1. Gor'kovskij Gosudarstvennyj Univ., Gorki (USSR). Issledovatel'skij Fiziko-Tekhnicheskij Inst.
- 2. Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (USSR)
Description
Stress state and dislocation structure of GaxIn1-xAsyP1-y epitaxial layers, grown on InP(001) substrates, are investigated by means of X-ray topography and diffractometry and optical microscopy. The effect of solid solution composition, noncorrespondence of lattice periods, layer thickness and dislocation density in substrate on coherent growth conditions, change of stress state and generation of noncorrespondence dislocations and inclined dislocations in epitaxial layers is investigated. Possible mechanisms and peculiarities of dislocation generation in GaxIn1-xAsyP1-y epitaxial layers an analyzed
Additional details
Additional titles
- Original title (Russian)
- Влияние состава твердых растворов на условия когерентного роста эпитаксиальных слоев Га
Publishing Information
- Journal Title
- Kristallografiya
- Journal Volume
- 33
- Journal Issue
- 6
- Series
- Kristallografiya.
- Journal Page Range
- 1469-1477
- ISSN
- 0023-4761
- CODEN
- KRISA
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- USSR
- INIS RN
- 20053747
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- DISLOCATIONS; EPITAXY; GALLIUM ARSENIDES; GALLIUM PHOSPHIDES; HIGH TEMPERATURE; INDIUM PHOSPHIDES; LATTICE PARAMETERS; LAYERS; QUANTITY RATIO; SOLID SOLUTIONS; STRAINS; TEMPERATURE DEPENDENCE; THICKNESS
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DIMENSIONS; DISPERSIONS; GALLIUM COMPOUNDS; HOMOGENEOUS MIXTURES; INDIUM COMPOUNDS; LINE DEFECTS; MIXTURES; PHOSPHIDES; PHOSPHORUS COMPOUNDS; SOLUTIONS