Published November 1988 | Version v1
Journal article

Effect of the composition of solid solutions on the conditions of coherent growth of GaxIn1-xAsyP1-y epitaxial layers

  • 1. Gor'kovskij Gosudarstvennyj Univ., Gorki (USSR). Issledovatel'skij Fiziko-Tekhnicheskij Inst.
  • 2. Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (USSR)

Description

Stress state and dislocation structure of GaxIn1-xAsyP1-y epitaxial layers, grown on InP(001) substrates, are investigated by means of X-ray topography and diffractometry and optical microscopy. The effect of solid solution composition, noncorrespondence of lattice periods, layer thickness and dislocation density in substrate on coherent growth conditions, change of stress state and generation of noncorrespondence dislocations and inclined dislocations in epitaxial layers is investigated. Possible mechanisms and peculiarities of dislocation generation in GaxIn1-xAsyP1-y epitaxial layers an analyzed

Additional details

Additional titles

Original title (Russian)
Влияние состава твердых растворов на условия когерентного роста эпитаксиальных слоев Га

Publishing Information

Journal Title
Kristallografiya
Journal Volume
33
Journal Issue
6
Series
Kristallografiya.
Journal Page Range
1469-1477
ISSN
0023-4761
CODEN
KRISA