Published August 1994 | Version v1
Journal article

Effects of hydrogen ion bombardment on carbon terminated Si(111) surface studied by LEED and AES

  • 1. Academia Sinica, Beijing, BJ (China). Inst. of Physics

Description

Etching effects of hydrogen ions on the Si(111)-(1 x 1)C surface have been studied by LEED (low-energy electron diffraction) and AES (Auger electron spectroscopy). It has been found that hydrogen ions can break the carbon-silicon covalent bonds and cause a phase transition of Si(111)-(1 x 1)C to the reconstructed Si(111)-(7 x 7) structure

Additional details

Publishing Information

Journal Title
Chinese Physics Letters
Journal Volume
11
Journal Issue
8
Journal Page Range
p. 498-501.
ISSN
0256-307X
CODEN
CPLEEU