Published 1988 | Version v1
Book

Electron and neutron irradiation effects on structural perfection of alloyed epitaxial films AlxGa1-xAs/GaAs

Description

The effect of 6 MeV electron irradiation with the fluence of 1015 cm-2 at 60 deg C and neutron irradiation in IRT-2000 reactor channel at 100 deg C on structural perfection of heteroepitaxial films AlxGa1-xAs/GaAs at x=0.18-0.7 is studied. Measurements of backscattering spectra and proton channeling, Hall effect and cathodoluminescence spectra on irradiated and reference samples are carried out. It is stated that small fluence irradiation results in increase of structural perfection degree dut to decomposition of defect complexes under their interaction with radiation-induced defects. 10 refs.; 2 figs

Additional details

Additional titles

Original title (Russian)
Влияние электронного и нейтронного облучения на структурное совершенство легированных эпитаксиальных пленок Ал

Publishing Information

Publisher
Ural'skij Politekh.
Imprint Place
Sverdlovsk (USSR)
Imprint Title
Chemistry of solids
Imprint Pagination
160 p.
Journal Page Range
p. 150-155.

Optional Information

Notes
Imprint:Khimiya tverdogo tela.;Mezhvuzovskij sbornik nauchnykh trudov.