Published 2007 | Version v1
Journal article Metadata-only

Silica aerogel films formation on silicon surfaces

Creators

  • 1. Kiyivs'kij Unyiversitet, Kyiv (Ukraine)

Description

A new technique of formation of thin charged silica aerogel films upon a Si surface is suggested. Degree of porosity of the synthesized films is estimated. Their composition and charge state of the dielectric-semiconductor system are studied

Additional details

Additional titles

Original title (Ukrainian)
Formuvannya plyivok aerogelyu kremnezemu na poverkhnyi kremnyiyu

Publishing Information

Journal Title
Vyisnyk Kyivskogo Universytetu. Fyiziko-Matematichnyi Nauki
Journal Issue
no.2
Journal Page Range
p. 231-234
ISSN
1812-5409

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
39064541
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
FILMS; POROSITY; PRODUCTION; SEMICONDUCTOR MATERIALS; SILICA GEL; SILICON; SURFACES; THICKNESS
Descriptors DEC
ADSORBENTS; DIMENSIONS; ELEMENTS; MATERIALS; SEMIMETALS