Enhancement of crystallographic and electrical properties in 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 thin films grown on Pb(Zr,Ti)O3-buffered platinized silicon substrates by sol-gel process
Creators
- 1. CEA, LETI, MINATEC, 17 Rue des Martyrs, F38054 Grenoble (France)
Description
We present here a comparative study of sol-gel-derived 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 (PMNT) thin films about 120 nm in thickness that were, respectively, deposited directly on a platinized Si substrate and on a Pb(Zr,Ti)O3 (PZT)-buffered one, but were both annealed at 750 deg. C in ambient air. It was found that the PZT buffer layer plays an important role in the enhancement of crystallographic and electrical properties of PMNT thin films. The PMNT film grown on PZT-buffered platinized Si substrate showed a nearly pure perovskite structure, while the film without buffer layer contained a big amount of pyrochlore phase. Also, the PZT buffer layer changed the preferred orientation of PMNT thin films from (111) to mainly (110) orientation, and helped to improve the films' densification and microstructural evolution. Coherent with what was observed comparatively in structural characterization, enhanced dielectric and leakage current characteristics were observed in the film with buffer layer. For the PMNT film grown directly on Pt-coated Si substrate, the dielectric permittivity is as low as 570, whereas the value is enhanced to 1200 for the PMNT film with PZT buffer layer. Moreover, the leakage current density of PMNT thin films is reduced remarkably, roughly 4-5 orders of magnitude lower, by introducing the PZT buffer layer.
Availability note (English)
Available from http://dx.doi.org/10.1088/1757-899X/8/1/012002Additional details
Identifiers
Publishing Information
- Journal Title
- IOP Conference Series. Materials Science and Engineering (Online)
- Journal Volume
- 8
- Journal Issue
- 1
- Journal Page Range
- [4 p.]
- ISSN
- 1757-899X
Conference
- Title
- Symposium G - Fundamentals and technology of multifunctional oxide thin films
- Acronym
- E-MRS 2009 spring meeting
- Dates
- 8-12 Jun 2009
- Place
- Strasbourg (France)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43019007
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BUFFERS; CRYSTALLOGRAPHY; GRAIN ORIENTATION; LAYERS; LEAKAGE CURRENT; PERMITTIVITY; PEROVSKITE; PZT; SILICON; SOL-GEL PROCESS; SUBSTRATES; THIN FILMS
- Descriptors DEC
- CURRENTS; DIELECTRIC PROPERTIES; ELECTRIC CURRENTS; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; LEAD COMPOUNDS; MICROSTRUCTURE; MINERALS; ORIENTATION; OXIDE MINERALS; OXYGEN COMPOUNDS; PEROVSKITES; PHYSICAL PROPERTIES; SEMIMETALS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS