Crystlline structure formation in cobalt doped MoSi2 films

Formation regularities of crystalline structure of cobalt doped molybdenum disilicide films is determined. It is determined, that cobalt doping of molybdenum disilicide target reduces by ∼ 50 K. the range of crystallization and does not change sequence of phase transitions at crystallization of films resulted from spraying of those targets. Phase transition from amorphous into crystalline state occur with higher velocity at film annealing in oxygen, than that in vacuum where oxidizing processes affect the crystallization