Modification of materials surface under irradiation by polyenergetic He+ and Ar+ ion beam

A change of hardness properties of Be, Al, Ni, Cu, Mo, 12Kh18N10T, 0Kh16N15M3B steel material surface under irradiation with He+ and Ar+ ion polyenergetic beam is studied. Analysis of effect produced by irradiated surface topography change and introduced atom distribution by sample depth on the microhardness magnitude is conducted. Microhardness increase under irradiation with polyenergetic ion beam is connected with introduced atom migration to depths, exceeding He+, Ar+ ion projective passage several times. The most complete explanation of deep penetration of the introduced atoms can be obtained within the framework of models, taking account of internal strain effect, ion dimension parameters and target material. 23 refs.; 6 figs