Field emission characteristics of chemical vapor deposited diamond thin films with SnO2 as overlayer on silicon
- 1. Department of Physics, School of Physical Sciences, North Maharashtra University, Jalgaon 425 001 (India)
Description
We have studied the field emission characteristics of chemically vapor deposited diamond thin films deposited on silicon substrate with tin-oxide (SnO2) as an overlayer. The diamond thin films were synthesized using the hot filament chemical vapor deposition method. The SnO2 coating on silicon substrate was prepared using Spray Pyrolysis technique. The diamond thin films were characterized by Raman spectroscopy and atomic force microscopy. The field emission current-voltage (I-V) measurements were performed in 'diode' configuration at a base pressure ∼1x10-8 mbar. The diamond films with SnO2 overlayer exhibit better emission characteristics as compared with normal diamond films. Also, the turn-on voltage required to draw 0.1 μA current for such films was found to be ∼40% less than that deposited on normal silicon substrate. The surface roughness revealed by atomic force microscopy is found to be ∼4.5 and 4.0 nm for diamond films with and without SnO2 overlayer, respectively
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2004.08.174;
- PII
- S0040-6090(04)01335-5;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 474
- Journal Issue
- 1-2
- Journal Page Range
- p. 275-278
- ISSN
- 0040-6090
- CODEN
- THSFAP
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36112514
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CURRENTS; DIAMONDS; ELECTRIC POTENTIAL; FIELD EMISSION; PLATINUM; PYROLYSIS; RAMAN SPECTROSCOPY; RUTHENIUM; SILICON; SILVER; SURFACES; THIN FILMS; TIN OXIDES; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- CARBON; CHALCOGENIDES; CHEMICAL COATING; CHEMICAL REACTIONS; COATINGS; DECOMPOSITION; DEPOSITION; ELEMENTS; EMISSION; FILMS; LASER SPECTROSCOPY; METALS; MICROSCOPY; MINERALS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PLATINUM METALS; REFRACTORY METALS; SEMIMETALS; SPECTROSCOPY; SURFACE COATING; THERMOCHEMICAL PROCESSES; TIN COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.