Published March 1, 2005 | Version v1
Journal article

Field emission characteristics of chemical vapor deposited diamond thin films with SnO2 as overlayer on silicon

  • 1. Department of Physics, School of Physical Sciences, North Maharashtra University, Jalgaon 425 001 (India)

Description

We have studied the field emission characteristics of chemically vapor deposited diamond thin films deposited on silicon substrate with tin-oxide (SnO2) as an overlayer. The diamond thin films were synthesized using the hot filament chemical vapor deposition method. The SnO2 coating on silicon substrate was prepared using Spray Pyrolysis technique. The diamond thin films were characterized by Raman spectroscopy and atomic force microscopy. The field emission current-voltage (I-V) measurements were performed in 'diode' configuration at a base pressure ∼1x10-8 mbar. The diamond films with SnO2 overlayer exhibit better emission characteristics as compared with normal diamond films. Also, the turn-on voltage required to draw 0.1 μA current for such films was found to be ∼40% less than that deposited on normal silicon substrate. The surface roughness revealed by atomic force microscopy is found to be ∼4.5 and 4.0 nm for diamond films with and without SnO2 overlayer, respectively

Additional details

Identifiers

DOI
10.1016/j.tsf.2004.08.174;
PII
S0040-6090(04)01335-5;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
474
Journal Issue
1-2
Journal Page Range
p. 275-278
ISSN
0040-6090
CODEN
THSFAP

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.