Nanocomposite of polycrystalline silicon and carbon nanotubes for micro- and nanomechanical systems

A thick proof mass is desired for inertial sensors obtained by surface micromachining that could improve its output characteristics. Alternative to thick layers additional layers are used. We consider nanocomposite of carbon and silicon as a material and high aspect ratio structures to increase layer thickness. Carbon nanotube arrays were grown and covered with silicon filling the space between the tubes by plasma enhanced chemical vapor deposition. The goal of the experimental research is to qualitatively establish the role of parameters of carbon nanotube arrays on the composition and phase distribution of carbon, silicon and voids. The nanocomposite has been obtained. The formation conditions of carbon nanotube arrays with intertube distance from 50 to 200 nm are determined. Silicon deposition parameters to ensure filling of the intertubular space, and to obtain nanocomposite layers with an acceptable density of voids at the base have been established. The estimation of geometric parameters of the nanocomposite was carried out. (paper)