X-ray diffraction microscopy for nanostructure analysis

The results of experiments using the hard X-ray beam line (BL29XUL) in Spring-8 are described. Nanostructure patterns of silicone nitride film, porous silica gel and Escherichia coli were observed. Outline of the X-ray diffraction microscopy method by Spring-8 BL29XUL, and regeneration of sample image by the iterative method, regeneration of sample image from the X-ray diffraction strength data, improvement of data analysis method and the experiment device are stated. In order to improve lack of the center part of the X-ray diffraction strength data, a new modified hybrid input-output (MHIO) algorithm was developed and four points of the experimental device such as the distance between pinhole and sample, parasite diffraction depend on guard slit and beam stop, and distance between sample and detector were improved. (S.Y.)