Published November 1972
| Version v1
Journal article
The formation of phases in fine tantalum films
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Образование фаз в тонких пленках тантала
Publishing Information
- Journal Title
- Izv. Akad. Nauk SSSR, Metal.
- Journal Issue
- no.6
- Series
- Izv. Akad. Nauk SSSR, Metal.
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 4066673
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; BCC LATTICES; CARBON; DIAGRAMS; FCC LATTICES; FILMS; GASES; IMPURITIES; MICROSTRUCTURE; MOLECULAR BEAMS; PHASE DIAGRAMS; PHASE TRANSFORMATIONS; SUBSTRATES; TANTALUM; TANTALUM IONS; TANTALUM OXIDES; TETRAGONAL LATTICES; VAPOR DEPOSITED COATINGS; VERY HIGH TEMPERATURE
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CHARGED PARTICLES; COATINGS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CUBIC LATTICES; ELEMENTS; FLUIDS; HEAT TREATMENTS; IONS; METALS; NONMETALS; OXIDES; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Notes
- For English translation see the journal Russ. Metall.