Published June 1980 | Version v1
Journal article

Doping of semi-insulating and n-type GaAs by neutron transmutation

  • 1. Siemens AG, Forschungslaboratorien, Muenchen, Germany

Description

By bombarding GaAs wafers with thermal neutrons it has been possible to introduce a specific constant donor concentration. The radiation damage caused by bombardment can be annealed at temperatures below 800 0C. A room temperature electron mobility of 3900 cm2/Vs has been achieved at an impurity concentration of 5 x 1017 cm-3. The doping of n--type layers shows, in addition to the expected doping effect, that the n--type layer is compensated near the semi-insulating substrate

Additional details

Publishing Information

Journal Title
J. Appl. Phys.
Journal Volume
51
Journal Issue
6
Series
J. Appl. Phys.
Journal Page Range
3178-3180
ISSN
0021-8979