Published April 2001 | Version v1
Journal article Metadata-only

Solid-state reactions underlying the thermal oxidation of Ni/InP structures

Creators

  • 1. Voronezhskij Gosudarstvennyj Univ., Voronezh (Russian Federation)

Description

The peculiarities of solid-phase interaction, underlying the thermal oxidation of the indium phosphide, modified by the nickel layer, are studied. It is established, that oxidation of indium phosphide with the thermal-vacuum application of the nickel layer leads to formation of layers, consisting mainly of the indium phosphates as well as the nickel phosphates and polyphosphates. The scheme of the process of the Ni/InP structures thermooxidation is proposed

Abstract (Russian)

Изучены особенности твердофазных взаимодействий при термооксидировании кислородом фосфида индия, модифицированного слоем никеля. Установлено, что окисление фосфида индия с вакуумно-термически нанесенным слоем никеля приводит к образованию слоев, состоящих в основном из фосфатов индия, а также фосфатов и полифосфатов никеля. Предложена схема протекания процесса термооксидирования структур Ni/InP

Additional details

Additional titles

Original title (Russian)
Твердофазные взаимодействия при термическом оксидировании структур Ни/InP

Publishing Information

Journal Title
Neorganicheskie Materialy
Journal Volume
37
Journal Issue
4
Journal Page Range
p. 399-404
ISSN
0002-337X
CODEN
NEOMB8

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
33022264
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
INDIUM PHOSPHATES; INDIUM PHOSPHIDES; INFRARED SPECTRA; NICKEL ADDITIONS; NICKEL PHOSPHATES; OXIDATION; PHASE STUDIES; TEMPERATURE RANGE 0400-1000 K
Descriptors DEC
ALLOYS; CHEMICAL REACTIONS; INDIUM COMPOUNDS; NICKEL ALLOYS; NICKEL COMPOUNDS; OXYGEN COMPOUNDS; PHOSPHATES; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; SPECTRA; TEMPERATURE RANGE; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
11 refs.; 4 tabs.; 5 figs.