Published 1985 | Version v1
Journal article Metadata-only

Ion beam gettering in A/sup III/B/sup V/ compounds

Creators

  • 1. Humboldt-Universitaet, Berlin (German Democratic Republic). Sektion Physik

Description

The changes in distribution of copper and nickel implantation profiles in GaAs and GaP after furnace and electron beam annealing have been investigated by means of secondary ion mass spectrometry (SIMS) and Rutherford backscattering technique (RBS). Characteristic parameters of gettering can be determined from gettering of copper at amorphous layers (produced by beams of Ar+, Kr+, As+, Ga+, P+ ions) as a function of annealing conditions

Additional details

Additional titles

Original title (German)
Ionenstrahlgetterung in A

Publishing Information

Journal Title
Wiss. Z. Humboldt-Univ. Berl., Math.-Naturwiss. Reihe
Journal Volume
34
Journal Issue
9
Series
Wiss. Z. Humboldt-Univ. Berl., Math.-Naturwiss. Reihe.
Journal Page Range
887-896
ISSN
0522-9863
CODEN
WZHMA

INIS

Country of Publication
Germany
Country of Input or Organization
German Democratic Republic
INIS RN
17074853
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
AMORPHOUS STATE; ANNEALING; ARGON 40 BEAMS; ARSENIC 75; COPPER; DEPTH; GALLIUM ARSENIDES; GALLIUM PHOSPHIDES; GALLIUM 69; GETTERING; IMPURITIES; ION BEAMS; ION IMPLANTATION; ION PROBES; KRYPTON 83; MASS SPECTROSCOPY; NICKEL; PHOSPHORUS 31 BEAMS; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; RUTHERFORD SCATTERING; SPATIAL DISTRIBUTION
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIC ISOTOPES; ARSENIDES; BEAMS; DIMENSIONS; DISTRIBUTION; ELASTIC SCATTERING; ELEMENTS; EVEN-ODD NUCLEI; GALLIUM COMPOUNDS; GALLIUM ISOTOPES; HEAT TREATMENTS; HOURS LIVING RADIOISOTOPES; INTERMEDIATE MASS NUCLEI; INTERNAL CONVERSION RADIOISOTO; ISOMERIC TRANSITION ISOTOPES; ISOTOPES; KRYPTON ISOTOPES; METALS; NUCLEI; ODD-EVEN NUCLEI; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PROBES; RADIATION EFFECTS; RADIOISOTOPES; SCATTERING; SPECTROSCOPY; STABLE ISOTOPES; TRANSITION ELEMENTS