Published 1989 | Version v1
Miscellaneous

Changes in deep bedding SixNy layers under action of 16 MeV nitrogen ions

Description

Short note

Additional details

Additional titles

Original title (Russian)
Изменения в глубоко залегающих слоях Си

Publishing Information

Imprint Title
Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals
Imprint Pagination
192 p.
Journal Page Range
p. 166.
Report number
INIS-SU--144/A

Conference

Title
19. All-union conference on physics of charged particles interaction with crystals.
Dates
29-31 May 1989.
Place
Moscow (USSR).

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
21023064
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CRYSTAL DEFECTS; ENERGY SPECTRA; ION IMPLANTATION; MEV RANGE 10-100; MONOCRYSTALS; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; SILICON; SILICON NITRIDES
Descriptors DEC
CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; ELEMENTS; ENERGY RANGE; IONS; MEV RANGE; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; SEMIMETALS; SILICON COMPOUNDS; SPECTRA

Optional Information

Notes
Imprint:Tezisy dokladov 19. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.