Published 1989
| Version v1
Miscellaneous
Changes in deep bedding SixNy layers under action of 16 MeV nitrogen ions
Description
Short note
Additional details
Additional titles
- Original title (Russian)
- Изменения в глубоко залегающих слоях Си
Publishing Information
- Imprint Title
- Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals
- Imprint Pagination
- 192 p.
- Journal Page Range
- p. 166.
- Report number
- INIS-SU--144/A
Conference
- Title
- 19. All-union conference on physics of charged particles interaction with crystals.
- Dates
- 29-31 May 1989.
- Place
- Moscow (USSR).
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 21023064
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- CRYSTAL DEFECTS; ENERGY SPECTRA; ION IMPLANTATION; MEV RANGE 10-100; MONOCRYSTALS; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; SILICON; SILICON NITRIDES
- Descriptors DEC
- CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; ELEMENTS; ENERGY RANGE; IONS; MEV RANGE; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; SEMIMETALS; SILICON COMPOUNDS; SPECTRA
Optional Information
- Notes
- Imprint:Tezisy dokladov 19. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.