Effect of SrTiO3 thickness on the capacitance-voltage characteristics of (La,Sr)CoO3/(Pb,La)(Zr,Ti)O3/SrTiO3/LaVO3 epitaxial heterostructures
Creators
- 1. Kookmin University, School of Advanced Materials Engineering, Seoul (Korea, Republic of)
- 2. University of California, Department of Materials Science and Engineering, Berkeley, CA (United States)
- 3. Purdue University, School of Materials Engineering, School of Electrical and Computer Engineering, West Lafayette, IN (United States)
Description
We report the effect of SrTiO3 thickness on the capacitance-voltage (C-V) characteristics of (La,Sr)CoO3/(Pb,La)(Zr,Ti)O3/SrTiO3/LaVO3 metal-ferroelectric-insulator-semiconductor (MFIS) epitaxial heterostructures. The C-V measurement of the heterostructure exhibited the asymmetry of capacitance with respect to gate bias. Within the given thickness range (5-30 nm), the amount of capacitance reduction at positive gate bias and the rapidness of capacitance reduction decreased with increasing SrTiO3 thickness, which is consistent with the C-V characteristics of conventional silicon-based MFIS capacitors. These results suggest that quantitative understanding on the electrical behavior of oxide heterostructures is possible with C-V analysis, with potentially important implications on their device applications. (orig.)
Availability note (English)
Available from: http://dx.doi.org/10.1007/s00339-012-7245-3Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics. A, Materials Science and Processing
- Journal Volume
- 109
- Journal Issue
- 2
- Journal Page Range
- p. 285-289
- ISSN
- 0947-8396
- CODEN
- APAMFC
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 44014834
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CAPACITANCE; COBALT OXIDES; DIELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; HETEROJUNCTIONS; HYSTERESIS; LANTHANUM OXIDES; LEAD COMPOUNDS; SEMICONDUCTOR MATERIALS; STRONTIUM OXIDES; STRONTIUM TITANATES; THICKNESS; VANADATES; X-RAY DIFFRACTION; ZIRCONATES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; COBALT COMPOUNDS; COHERENT SCATTERING; DIELECTRIC MATERIALS; DIFFRACTION; DIMENSIONS; ELECTRICAL PROPERTIES; LANTHANUM COMPOUNDS; MATERIALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RARE EARTH COMPOUNDS; SCATTERING; SEMICONDUCTOR JUNCTIONS; STRONTIUM COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS; ZIRCONIUM COMPOUNDS