Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems

Al-doped ZnO (AZO) films were deposited on fused silica glass substrates unheated or heated at 200 oC by reactive dc sputtering using a Zn-Al alloy target with mid-frequency pulsing (50 kHz) and the plasma control unit with a feedback system of the optical emission intensity of the atomic O* line at 777 nm to control oxygen gas flow. The stable and reproducible depositions were successfully carried out in the transition region. The deposition rates attained in this study were about 10-20 times higher than the one by conventional sputtering using oxide targets. The AZO films with the lowest resistivity of 3.8 x 10-4 Ω cm was deposited on the substrate heated at 200 oC with a sputter power of 4 kW, where the deposition rate was 385 nm/min.