Electrical contact studies of chemically treated YBa2Cu3O7-x surfaces
Creators
- 1. Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA (USA)
Description
Results on electrical characterization of high Tc thin film surfaces modified by different surface treatments are presented. In particular, this work examines the effect of a Br/ethanol chemical etch, which has previously been shown to remove surface contamination while preserving the Cu(+2) oxidation state. Electrical measurements of YBa2Cu3O7-x/Au/Nb contact structures fabricated using polycrystalline, post-annealed YBa2Cu3O7-x films with Br-etched surfaces, show improvements of approximately one to two orders of magnitude in contact current densities and resistivities (resistance-area products) relative to unetched contacts. The Br-etch process has produced 10x10 μm2 contacts with contact current densities greater than 400 A/cm2 and RnA products as low as 4x10-7 Ω-cm2
Additional details
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 199
- Journal Issue
- 1
- Series
- AIP Conf. Proc.
- Journal Page Range
- 212-217
- ISSN
- 0094-243X
- CODEN
- APCPC
Conference
- Title
- processing, characterization, and applications.
- Acronym
- 3. annual topical conference on high T_c superconducting thin films
- Dates
- 23-27 Oct 1989.
- Place
- Boston, MA (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 22007918
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BARIUM OXIDES; CHEMICAL REACTIONS; COPPER OXIDES; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTRIC CONTACTS; ETCHING; FABRICATION; HIGH-TC SUPERCONDUCTORS; SUPERCONDUCTING FILMS; SURFACE CONTAMINATION; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CONTAMINATION; COPPER COMPOUNDS; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; EQUIPMENT; FILMS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SUPERCONDUCTORS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-891092--.