Threedimensional microfabrication using synchrotron radiation

For fabricating microstructures with extreme structural heights a technology has been developed which is based on deep-etch lithography and subsequent replication processes. A particularly high precision is achieved if the lithographic process is carried out by means of synchrotron radiation. Electroforming and molding processes are used for the replication of microstructures from a large variety of materials. The field of application comprises sensors, electrical and optical microconnectors, components for fluid technology, microfiltration systems and novel composite materials. (author)