Influence of ion-beam bombardment on the physical properties of 100Cr6 steel

The effect of ion-beam bombardment with low energy Xe ions on the physical properties of 100Cr6 steel is reported. The modified region induced by the relative low energy ions (<1 keV) extends orders of magnitude deeper than the stopping length of the impacting ions. The energy dependence of the in-depth stress and the pattern formation is also verified. The formation of peculiar patterns on the treated surface is discussed by evoking the current model of surface instability produced by preferential sputtering and surface diffusion in metals. - Highlights: • 100Cr6 steel substrates were bombarded with low energies Xe ions. • The stress depth profile generated by the bombardment varies with ions energy. • Pyramidal surface patterns are formed after bombardment with 1.0 keV ions. • Substrates bombarded with 0.4 keV ions present the highest Xe concentration. • 0.4 keV ions induce maximum strain/stress at the surface top layers