Published May 1978 | Version v1
Journal article Metadata-only

Acoustic model for ion-implanted lithium surfaces used to propagate elastic waves

Creators

  • 1. Montpellier-2 Univ., 34 (France)
  • 2. Thomson-CSF, Domaine de Corbeville, 91 - Orsay (France)

Description

An acoustic model is proposed for ion-implanted acoustic surface wave delay lines on lithium niobate. Experimental and computed results about the variation of the electromechanical coupling coefficient of the wave give the value of the layer thickness perturbed by ions. The phase velocity variations show up a change of the shear modulus of the substrate

Abstract (French)

Un modele est propose pour les lignes a retard a ondes acoustiques de surface dont le substrat de niobate de lithium, a ete bombarde par des ions He+. Les mesures et les calculs theoriques de la variation du coefficient de couplage electromecanique de l'onde de surface permettent de determiner l'epaisseur de la zone perturbee par implantation ionique. Les resultats des mesures et des calculs de la variation de la vitesse de phase de l'onde mettent en evidence une perturbation du module de cisaillement du substrat

Additional details

Additional titles

Original title (French)
Modelisation de surfaces de niobate de lithium perturbees par des ions implantes et utilises pour propager des ondes elastiques

Publishing Information

Journal Title
Rev. Phys. Appl.
Journal Volume
13
Journal Issue
5
Series
Rev. Phys. Appl.
Journal Page Range
241-245

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
10471442
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
EV RANGE 100-1000; HELIUM IONS; ION IMPLANTATION; LITHIUM COMPOUNDS; NIOBATES; RAYLEIGH WAVES; SURFACE PROPERTIES
Descriptors DEC
ALKALI METAL COMPOUNDS; CHARGED PARTICLES; ENERGY RANGE; EV RANGE; IONS; NIOBIUM COMPOUNDS; OXYGEN COMPOUNDS; SEISMIC WAVES; TRANSITION ELEMENT COMPOUNDS