Investigation of diamond-like carbon films and preparation of carbon nanotubes

The morphology as well as optical and electrical properties of diamond-like carbon (DLC) films synthesized by plasma assisted chemical vapor deposition. Recently, structural changes in carbon films under external influence, the influence of hybridized states of carbon atoms, materials for doping the films for obtaining high conductivity and high carrier mobility as well as the dependence of refractive index on the technological parameters were studied. In present report methods of nanotechnology controlling by means of measuring the spectra of plasma radiation depending on the gas composition and energy, affecting the cluster structure of obtained films in real time mode are discussed. Percolation capacities of clusters as well as conductivity of DLC differ in a wide range of cluster size. Temperature dependence of conductivity testifies to their semiconducting properties. Here the results of measurements of spectra of optical transmission, reflection, photosensitivity and refractive index of obtained DLC films are presented. The AFM images of the surface of DLC films obtained for different content of initiators and parameters which effect the representation, morphology and histogram of obtained data. Surface nanotubes are seen with high resolution. Developed DLC films found different applications the list of which can be extended. Unique properties of these films improve each year. (author)