Trapping characteristics of gaseous ruthenium oxides by Y2O3 filter

The behavior characteristics of vapor phase ruthenium oxides trapped on yttria ceramic foam filter in the two zone(volitizing and trapping zone) furnace has been studied under air atmosphere by using XRD(X-Ray Diffraction) and XRF(X-Ray Fluorescence). Also, ruthenium trapped on yttria filter under air atmosphere was identified as Y2Ru2O7 of pyrochlore structure above 900 deg C. The XRF result of ruthenium trapped on an Y2O3 filter under the condition (trapping temperature;1200 deg C, gas velocity;2 ∼ 10cm/sec) showed that concentration of ruthenium on the back and the front of filter decreased linearly with increasing gas velocity, and the back face concentrations of filter were lower than the front face concentrations by about 30 ∼ 45%