Published August 8, 1988
| Version v1
Journal article
Smooth high T/sub c/ Y1Ba2Cu3O/sub x/ films by laser deposition at 650 0C
- 1. Bellcore, Red Bank, New Jersey 07701
Description
Superconducting Y1Ba2Cu3O/sub x/ films 300 nm thick with local surface roughness <5 nm have been prepared by laser deposition at 650 0C and subsequent heat treatments at 450 0C; highest zero resistance temperature was above 85 K. Smooth topography and low-temperature processing are crucial for device fabrication. These films are crack-free and density of particles with >1 μm diameter was <10/cm2. We suggest that an effective increase in surface temperature and deposition directly in the orthorhombic phase contributes to film quality
Additional details
Publishing Information
- Journal Title
- Appl. Phys. Lett.
- Journal Volume
- 53
- Journal Issue
- 6
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 517-519
- ISSN
- 0003-6951
- CODEN
- APPLA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 19087516
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ALUMINIUM OXIDES; BARIUM OXIDES; COATINGS; COPPER OXIDES; CRACKS; DEPOSITION; EXPERIMENTAL DATA; FABRICATION; HIGH TEMPERATURE; LASER RADIATION; LOW TEMPERATURE; PHASE STUDIES; ROUGHNESS; SUPERCONDUCTING FILMS; SURFACE COATING; TOPOGRAPHY; TRANSITION TEMPERATURE; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ALUMINIUM COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COPPER COMPOUNDS; DATA; ELECTROMAGNETIC RADIATION; FILMS; INFORMATION; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATIONS; SURFACE PROPERTIES; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS