Published August 8, 1988 | Version v1
Journal article

Smooth high T/sub c/ Y1Ba2Cu3O/sub x/ films by laser deposition at 650 0C

  • 1. Bellcore, Red Bank, New Jersey 07701

Description

Superconducting Y1Ba2Cu3O/sub x/ films 300 nm thick with local surface roughness <5 nm have been prepared by laser deposition at 650 0C and subsequent heat treatments at 450 0C; highest zero resistance temperature was above 85 K. Smooth topography and low-temperature processing are crucial for device fabrication. These films are crack-free and density of particles with >1 μm diameter was <10/cm2. We suggest that an effective increase in surface temperature and deposition directly in the orthorhombic phase contributes to film quality

Additional details

Publishing Information

Journal Title
Appl. Phys. Lett.
Journal Volume
53
Journal Issue
6
Series
Appl. Phys. Lett.
Journal Page Range
517-519
ISSN
0003-6951
CODEN
APPLA