Dependence of parameters of empirical model of the surface resistance of a high-temperature superconduction film on technological process parameters

Dependence of surface resistance on the heater substrate temperature was studied for the purpose of optimizing the regime of the YBCO films production. The R high sensitivity for accuracy of sustaining the heater substrate temperature and assuring the minimum value of the films surface resistance and the maximum value of the Y parameter, determining the temperature dependencies of conductivity Q(t) and penetration depth L(t), is given