Published 2020
| Version v1
Book
Development of a photoelectrochemical etching unit for obtaining porous silicon with a laterally gradient porous texture
Creators
- 1. SPbGEhTU (LEhTI), Sankt-Peterburg (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Разработка установки фотоэлектрохимического травления для получения пористого кремния с латеральноградиентной пористой текстурой
Publishing Information
- Publisher
- POLITEKh-PRESS
- Imprint Place
- Sankt-Peterburg (Russian Federation)
- ISBN
- 978-5-7422-7050-8
- Imprint Title
- International conference #Left-Pointing Double Angle Quotation Mark#PhysicA.SPb#Right-Pointing Double Angle Quotation Mark#. Thesis of reports
- Imprint Pagination
- 550 p.
- Journal Page Range
- p. 168-169
Conference
- Title
- International conference on PhysicA.SPb
- Original Conference Title
- Mezhdunarodnaya konferentsiya «FizikA.SPb»
- Dates
- 19-23 Oct 2020
- Place
- Sankt-Peterburg (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 54098922
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ELECTRIC FIELDS; ELECTROCHEMICAL CORROSION; EQUIPMENT; ETCHING; HELIUM-NEON LASERS; MONOCRYSTALS; POROUS MATERIALS; SAMPLE PREPARATION; SILICON
- Descriptors DEC
- CHEMICAL REACTIONS; CORROSION; CRYSTALS; ELEMENTS; GAS LASERS; LASERS; MATERIALS; SEMIMETALS; SURFACE FINISHING
Optional Information
- Notes
- 4 refs. Imprint:Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#FizikA.SPb#Right-Pointing Double Angle Quotation Mark#. Tezisy dokladov