Published November 1995 | Version v1
Journal article Metadata-only

Features of a microwave plasma generator with resonance energy input

Creators

  • 1. Institute of Nuclear Physics, Moscow (Russian Federation)

Description

The properties of the ionic component of a microwave plasma produced by a generator with transverse resonance energy input were investigated. The influence of the magnetic-field magnitude and geometry on the concentration and the energy distribution of ions was studied. Possible mechanisms of microwave-energy absorption in different conditions are discussed on the basis of the experimental data obtained

Additional details

Publishing Information

Journal Title
Russian Microelectronics
Journal Volume
24
Journal Issue
6
Journal Page Range
p. 409-413.
ISSN
1063-7397
CODEN
RUICE5

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
27044760
Subject category
S42: ENGINEERING; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Translation
Descriptors DEI
ELECTRON CYCLOTRON-RESONANCE; ENERGY DEPOSITION; MAGNETIC FIELDS; MICROWAVE AMPLIFIERS; MICROWAVE HEATING; PLASMA; PLASMA POTENTIAL
Descriptors DEC
AMPLIFIERS; CYCLOTRON RESONANCE; ELECTRIC POTENTIAL; ELECTRONIC EQUIPMENT; EQUIPMENT; HEATING; MICROWAVE EQUIPMENT; RESONANCE

Optional Information

Notes
Translated from Mikroelektronika; 24: No. 6, 467-471(1995).