A comparison of the analysis of non-centrosymmetric materials based on ion and electron beams

Techniques like electron backscattered diffraction (EBSD) and angle-resolved electron Rutherford backscattering (ERBS) are sensitive to the lack of inversion symmetry in crystals and hence can determine the absolute crystal orientation. In this paper we demonstrate for the case of GaP that medium energy ion scattering (MEIS) can also be used to obtain the absolute crystal orientation. A comparison between the 2D-backscattering intensities as a function of the detection directions for electrons (as is measured in EBSD or ERBS) and protons (as is measured in MEIS) is made and discussed in terms of diffraction and classical subchanneling respectively.