New profiled silicon PIN photodiode for scintillation detector

Silicon photodiodes (planar PIN) are employed for the read out of scintillation shower counters. The authors have already reported on a new doping method called molecular layer doping (MLD) which has been developed for very large scale integrated (VLSI) technologies. In tis study, several types of PIN photodiodes, in which a p+ layer was formed by MLD (MLD-PIN) or BFD2 ion implantation (BF2 I/I-PIN), have been examined. The MLD-PIN has a shallow P+ junction depth (xj) with sufficient high surface concentration, and simply and easily provides good performance for a short-wavelength photo sensitivity