Published 2005
| Version v1
Book
MD simulation for sputtering with highly charged ions
- 1. BRCIA, Dongshin Univ., Naju, Jeonnam (Korea, Republic of)
- 2. Argonne National Lab., Argonne, IL (United States)
Description
Sputtering processes in the bombardment of highly charged ions (HCls) are studied using molecular dynamics simulation. The dynamics of particle ejection (sputtering) from the surface and crater formation on the surface are simulated. Strong dependence of the sputtering yield on the HCI potential energy is found
Abstract (Russian)
С помощью моделирования методом молекулярной динамики изучаются процессы распыления при бомбардировке высокозаряженными ионами (ВЗИ). Моделируется динамика выброса (распыления) частиц с поверхности и образование кратеров на ней. Установлена сильная зависимость выхода распыления от потенциальной энергии ВЗИAdditional details
Additional titles
- Original title (English)
- Materialy XVII Mezhdunarodnoj konferentsii Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005). Tom 1
Publishing Information
- Publisher
- Izd-vo MAI
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 5-7035-1560-2
- Imprint Title
- Book of reports of XVII International conference Ion-surface interactions ISI-2005. Vol. 1
- Imprint Pagination
- 600 p.
- Journal Page Range
- p. 160-163
Conference
- Title
- 17. International conference Ion-surface interactions ISI-2005
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- 25-29 Aug 2005
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38067500
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMPUTERIZED SIMULATION; CRATERS; ENERGY DEPENDENCE; ION IMPLANTATION; KEV RANGE; MATHEMATICAL MODELS; MOLECULAR DYNAMICS METHOD; MULTICHARGED IONS; SHOCK WAVES; SPUTTERING
- Descriptors DEC
- CALCULATION METHODS; CAVITIES; CHARGED PARTICLES; ENERGY RANGE; IONS; SIMULATION
Optional Information
- Notes
- 12 refs., 2 figs. Imprint:Materialy XVII Mezhdunarodnoj konferentsii Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005). Tom 1