Novel Zeff imaging using X-ray backscattering

Backscattering element imaging is a new imaging method to irradiate a sample with X-rays and perform the energy analysis of the X-rays scattered on the irradiation side to acquire element information inside the sample (effective atomic number and its spatial distribution). This paper introduces the principle, device, and the results of principle experiments using monochromatic synchrotron radiation. By use of high-energy X-rays in this method, it is possible to obtain elemental information in the deep part of the sample, which has not been possible to date, in addition to that on the surface. This method is expected to be applied to foreign matter contamination inspection and defect analysis. (A.O.)