Published 1993
| Version v1
Book
Sub-μm structuring of high-temperature superconductors
- 1. RWTH Aachen (Germany). Inst. fuer Halbleitertechnik 2
Description
Short communication
Additional details
Additional titles
- Original title (German)
- Sub-μm-Strukturierung von Hochtemperatursupraleitern
- Augmented title (English)
- Ar/O_2 ion beam etching
Publishing Information
- Publisher
- VDI-Verl.
- Imprint Place
- Duesseldorf (Germany)
- ISBN
- 3-18-401258-1
- Imprint Title
- Superconductivity and cryogenics. Reports on R and D projects in the field of physical technologies sponsored by the Federal Minister for Research and Technology
- Imprint Pagination
- 810 p.
- Series
- VDI-TZ-Proceedings.
- Journal Page Range
- p. 113-116.
Conference
- Title
- Superconductivity and cryogenics status seminar.
- Original Conference Title
- Statusseminar Supraleitung und Tieftemperaturtechnik
- Dates
- 21-23 Sep 1992.
- Place
- Potsdam (Germany).
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 26032139
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- BARIUM OXIDES; COPPER OXIDES; CRITICAL CURRENT; ETCHING; HIGH-TC SUPERCONDUCTORS; ION BEAMS; LAYERS; MASKING; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; BEAMS; CHALCOGENIDES; COPPER COMPOUNDS; CURRENTS; ELECTRIC CURRENTS; OXIDES; OXYGEN COMPOUNDS; SUPERCONDUCTORS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS
Optional Information
- Contract/Grant/Project number
- Foerderkennzeichen BMFT TK03350
- Notes
- Imprint:Supraleitung und Tieftemperaturtechnik. Berichte zu F und E-Projekten aus dem Foerderbereich Physikalische Technologien des Bundesministers fuer Forschung und Technologie.